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Highly professional sf6 cf4 Mexico,1/12/2006Abstract: In this work, highly anisotropic Si plasma etching process has been developed in reactive ion etching (RIE) reactor. The etch chemistry utilized consists of a mixture of sulphur tetra fluoride (SF 6), oxygen (O 2) and argon (Ar).The use of Nickel as masksGet price
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24/4/2020sf6 gas is an effective and permanent dielectric gas that also extinguishes arcs in circuit-breakers." In the gaseous state, sulphur hexafluoride is invisible, odourless, non-combustible and non-toxic. It is also heavier than air, so it displaces oxygen.Get price
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